Deposition and post-processing techniques for transparent conductive films

ABSTRACT

In one embodiment, a method is provided for fabrication of a semitransparent conductive mesh. A first solution having conductive nanowires suspended therein and a second solution having nanoparticles suspended therein are sprayed toward a substrate, the spraying forming a mist. The mist is processed, while on the substrate, to provide a semitransparent conductive material in the form of a mesh having the conductive nanowires and nanoparticles. The nanoparticles are configured and arranged to direct light passing through the mesh. Connections between the nanowires provide conductivity through the mesh.

RELATED DOCUMENTS

This patent document claims benefit under 35 U.S.C. §119 to U.S.Provisional Patent Application Ser. No. 61/433,105, entitled “Depositionand Post-Processing Techniques for Thin Nanostructured Films” and filedon Jan. 14, 2011; this patent document and the Appendices filed in theunderlying provisional application, including the references citedtherein, are fully incorporated herein by reference.

FEDERALLY-SPONSORED RESEARCH AND DEVELOPMENT

This invention was made with Government support under contractDE-FG36-08GO18005 awarded by the Department of Energy. The Governmenthas certain rights in this invention.

FIELD

One or more embodiments generally relate to transparent conductive filmsand the manufacture thereof.

BACKGROUND

Transparent conducting films play an important role in many devicescombining light with electrical function in a number of applications.Depending on the application (e.g., displays, touch screens, solarcells), the transparent conducting films are used to form electrodeshaving unique combinations of electronic, optical, and surfaceproperties.

Transparent conductors can be important material components incommercially viable optoelectronic devices, as they combine theproperties of high transmission in the visible spectral range and lowsheet resistivity. Materials used for these applications should notsignificantly suffer from disadvantages, such as poor natural abundance,high-cost processing steps (some require high temperatures and vacuumchambers) and/or inability to bend with flexible substrates—thus makingthese materials difficult to implement with low-cost and high-throughputelectronic applications.

In the context of photovoltaic (PV) cells, transparent conductive filmsare often used as both the top transparent electrode as well as the backelectrode of the device stack. Texturing techniques are often employedto induce light scattering and thus increase photon path lengths and theprobability of absorbing sub-band gap energy photons as well as tooffset absorption losses due to the use of less photovoltaic activelayer material in the cell.

Established deposition technologies involve high temperature, vacuumsputtering processes, and harsh chemicals, which can result inless-than-ideal film texturing. For example, transparent conductivefilms have been produced using vacuum deposition of indium tin oxide(ITO), fluorine doped tin oxide (FTO), or aluminum doped zinc oxide(Al:ZnO). These methods produce brittle films using scarce materialsand/or capital-intensive techniques.

Recent developments in low-temperature, solution-processable transparentelectrode replacements (using metal/semiconductor nanostructures andcarbon based nanomaterials) have achieved comparable performances toITO. However, effectively scattering light using these approaches hasbeen challenging, which can present difficulties when trying tofabricate a scattering transparent conductive electrode for poorlyabsorbing thin film PVs. Further, films can be too rough to be used withorganic materials (e.g., organic light emitting diodes (OLED), organicphotovoltaic cells, etc.). For example, OLEDs devices are very sensitiveto the roughness of the transparent conductive layer (high roughnessleads to shorting between device layers).

One or more embodiments may address one or more of the above issues.

SUMMARY

This disclosure describes a variety of fabrication methods to producesemi-transparent, conductive, and highly scattering thin nanostructuredfilms, suitable for use in a wide variety of devices. This disclosurealso describes a variety of apparatuses (and as implementable insystems) employing such films.

In one embodiment, a method is provided for fabrication of asemi-transparent conductive mesh. A first solution having conductivenanowires suspended therein and a second solution having nanoparticlessuspended therein are sprayed toward a substrate, the spraying forming amist. The mist is processed, while on the substrate, to provide asemitransparent conductive material in the form of a mesh having theconductive nanowires and nanoparticles. The nanoparticles direct lightpassing through the mesh, and connections between the nanowires provideconductivity through the mesh.

In another embodiment, a method is provided for fabrication of asemitransparent conductive mesh. A solution having conductive nanowiressuspended therein is sprayed toward a substrate, the spraying forming amist. The mist is processed, while on the substrate, to provide asemitransparent conductive material in the form of a mesh of theconductive nanowires. The nanowires of the mesh are joined at pointswhere the nanowires cross to provide a conductivity characteristicthroughout the semitransparent conductive material, and the mesh isflattened.

In yet another embodiment, an apparatus is provided. The apparatusincludes a substrate and a layer of one or more photovoltaic cellsformed on the substrate. A semitransparent conductive film is formed onthe layer of one or more photovoltaic cells, the semitransparentconductive film having a mesh of conductive nanowires and nanoparticlespseudo-randomly oriented on the surface of the layer, the nanoparticlesconfigured to direct light passing through the semitransparentconductive film. Connections between the nanowires provide conductivitythrough the semitransparent conductive film.

Other aspects of the present disclosure may be more completelyunderstood in consideration of the following more-detailed descriptionof various experimental embodiments and specific applications herein,which may be implemented in connection with one or more of theabove-described aspects, embodiments, and implementations.

BRIEF DESCRIPTION OF THE DRAWINGS

The disclosure may be more completely understood in consideration of thedetailed description of various embodiments of the disclosure thatfollows in connection with the accompanying drawings as follows:

FIG. 1 shows a spray deposition schematic, consistent with one or moreembodiments;

FIG. 2 shows a laser annealing schematic, consistent with one or moreembodiments;

FIG. 3 shows a densely sprayed Ag nanowire mesh (scale bar=2 μm), as maybe consistent with one or more embodiments;

FIG. 4 shows a sprayed ZnO nanoparticles (scale bar=500 nm), as may beconsistent with one or more embodiments;

FIG. 5 shows wire-wire junctions, laser annealed and embedded intopolymer, as may be consistent with one or more embodiments;

FIG. 6 shows a disconnected wire mesh after laser patterning, as may beconsistent with one or more embodiments;

FIG. 7 shows a laser pattern edge of Ag nanowires on glass substrate, asmay be consistent with one or more embodiments;

FIG. 8 shows a DC to optical conductivity ratio comparison for severaltransparent conductor implementations, as may be consistent with one ormore embodiments;

FIG. 9 shows a transmittance & sheet resistance comparison for severaltransparent conductor implementations, as may be consistent with one ormore embodiments;

FIG. 10 shows haze improvement of hybrid films relative to pure Ag, asmay be consistent with one or more embodiments;

FIG. 11 shows hybrid film haze improvement, as may be consistent withone or more embodiments; and

FIG. 12 shows a hybrid film summary, as may be consistent with one ormore embodiments.

While the disclosure is amenable to various modifications andalternative forms, specifics thereof have been shown by way of examplein the drawings and will be described in detail. It should beunderstood, however, that the intention is not to limit the disclosureto the particular embodiments described. On the contrary, the intentionis to cover all modifications, equivalents, and alternatives fallingwithin the spirit and scope of the disclosure.

DETAILED DESCRIPTION

This disclosure describes a variety of fabrication methods to producetransparent, conductive and highly scattering thin nanostructured films,suitable for use in a wide variety of devices (in some instances,without further modification). This disclosure also describes a varietyof apparatuses, which may implement such films.

In one or more embodiments, a transparent conductive film is formed froma mesh of nanowires. In a particular implementation, silver (Ag)nanowires are implemented in a mesh to provide conductivecharacteristics while also exhibiting strong transmissive properties forlight. It is understood that such a mesh is semi-transparent in thatlight passes through, and in that some light may be reflected and/orabsorbed by the mesh. For ease of reference, transparent andsemitransparent films may generically be referred to as beingtransparent.

In some embodiments, light scattering properties are enhanced usingnanoparticles distributed throughout the nanowire mesh. For instance,zinc oxide (ZnO) nanoparticles may be distributed throughout a mesh toprovide light scattering and therein produce a hybrid transparentconductive film of nanowires and nanoparticles. Conductivity in thehybrid film is provided by overlapping ones of the nanowires in the meshand light scattering is provided by the nanoparticles distributed in themesh. For various embodiments, conductivity and light scattering may beindependently controlled in film formation by, e.g., adjusting theconcentrations of the deposited nanowires and nanoparticles. Whileseveral materials may be used to form the nanowires and nanoparticles ofthe hybrid film, for ease of explanation the examples and embodimentsare primarily described with reference to hybrid films including Agnanowires and ZnO nanoparticles.

One or more embodiments provide solution-based methods for fabricatinghybrid transparent conductive films (e.g., as opposed to vacuum baseddeposition processes), where films are deposited using low-temperaturespray deposition techniques that could serve as turnkey replacements forestablished technologies for transparent conductive electrodefabrication. A solution-processed pneumatic spray deposition can be usedto form films having ZnO/Ag nanostructures (e.g., nanowires,nanoparticles, etc.) configured and arranged as described above toprovide superior sheet resistances (R_(sheet)<5 Ω/sq) and highertransmissions (T>90%) and significantly higher haze (scattering) atinfrared/near-infrared wavelengths (Haze_(1100nm)>30%) than industrystandard Zinc Oxide (ZnO) or Indium Tin Oxide (ITO) can be repeatedlydeposited.

While the solution based pneumatic spray deposition methods areprimarily described with reference to deposition of hybridnanostructured films having Ag nanowires and ZnO nanoparticles, it isrecognized that the solution based pneumatic spray deposition methodsmay be applied to deposition of either Ag nanowires or ZnO nanoparticlesindependent of the other as well.

For ease of reference, the term nanostructure may be generically usedherein to refer to any nanostructured material whose composition ismodulated over nanometer length scales in one, two, or three dimensions,including, e.g., nanowires and nanoparticles. The term nanowire may beused to refer to an elongated nanostructures and nanoparticle may beused to refer to a non-elongated nanostructure as would be understood byone skilled in the art.

In one embodiment, nanowires and nanoparticles are transferred fromsuspension in an alcohol solution onto a substrate. The solution isvortex-mixed to ensure that the colloidal solution is homogenous. Thesolution is then drawn into a syringe and loaded into a syringe pump.The syringe pump delivers the solution to a spray nozzle that convertsthe solution into a mist. Various types of nozzles may be utilized indifferent implementations. For instance, in one implementation, apneumatic spray nozzle mixes a pressurized gas (e.g., N₂) and a liquidsolution at the tip where the gas pressure converts the solution into amist and projects it towards the substrate. In some other embodiments,the nozzle may utilize sonic vibrations to convert the solution into amist. It is recognized that other types of nozzles may be used as well.

FIG. 1 shows a spray deposition schematic that may be used in accordancewith one or more embodiments. In this embodiment, a computer program isused to control spray system variables including, e.g., solutiondelivery rate (to within 1 μl/hr), the N₂ gas pressure (to within 1psi), the substrate holder temperature (to within 2° C.) and themovement speed and pattern of the substrate. The distance between thenozzle and the substrate is manually adjustable. The spray systemvariables are controlled such that the deposition leaves a uniformdensity distribution of pseudo-randomly oriented nanostructures on thesubstrate. This is achieved when the solvent droplets of the mist aresized so that each one contains roughly one nanostructure.

In some embodiments, a spray parameter is controlled to set a dropletsize upon impact with the substrate. This is influenced by solventevaporation rate (controlled here by substrate temperature), nozzleheight, N₂ pressure, solution flow rate and type of solvent used. Forexample, if the solvent droplets are too large when they reach thesubstrate, they will coalesce on the substrate surface and lead to anon-uniform film with aggregations of nanowires and/or nanoparticles. Onthe other hand, if the solvent droplets are too small out of the nozzle,the solvent will evaporate before reaching the substrate and thenanostructures will not stick, resulting in wasted nanostructures andpoor transfer efficiency (transfer efficiency=[nanostructure mass onsubstrate]/[nanostructure mass in solution]). In this scenario, strikingthis size balance can help enable the results as shown below.

In this embodiment, the deposition process uses Ag nanowires, ZnOnanoparticles and a mixture of the two morphologies, with IsopropylAlcohol (IPA) and Ethanol (EtOH) as solvents. The spray deposition formsa mesh of Ag nanowires randomly oriented on the substrate surface. Theholes in the mesh allow light to pass through while the connectionsbetween the wires allow for electrical conductivity along the mesh.Silver exhibits high reflectivity and low absorption for visible light,which enhances (e.g., maximizes) light transmission through the film.Zinc oxide deposition produces a mat of nanoparticles on the substratesurface. Zinc oxide is also a poor absorber of visible light and has arelatively high refractive index; these material properties are coupledwith the proper nanoparticle geometry to achieve ZnO films that exhibitvery high haze and high total transmissivity.

This deposition process can be used to co-deposit Ag nanowires and ZnOnanoparticles simultaneously. The simultaneous deposition may beperformed from a mixed solution containing both Ag nanowires and ZnOnanoparticles or using separate solutions respectively containing eitherAg nanowires or ZnO nanoparticles. Alternatively, the deposition processmay deposit Ag nanowires and ZnO nanoparticles sequentially (one afteranother).

In one embodiment, a laboratory scale spray deposition system may beused to form the hybrid films described above. To use this system, apressure driven delivery system can replace the syringe pump drivendelivery. Here, the nanostructure solution is contained in an enclosedpressure vessel. Gas is forced into the vessel at a controlled pressure,which forces the liquid out of a delivery tube to the nozzle. The liquidflow rate is then primarily a function of gas pressure, nozzle orificesize, and liquid viscosity.

In certain embodiments, an X-Y stage is used to raster the substrateunder the nozzle many times in order to cover the desired substrate areawith a desired density of nano structures. Other embodiments may use asystem analogous to a “roll-to-roll” process, where a continuoussubstrate web passes linearly through a deposition machine and thedeposition is complete by the time the substrate has been pulled throughthe machine. In this scenario, one or more rows of nozzles may be spacedappropriately so that coverage remains uniform. In some otherembodiments, deposition onto PET (polyethylene terephthalate) may beused. For certain large area applications (such as PV and OLEDs),concentrating on flexible, roll-to-roll PET substrates can play animportant role.

In one or more embodiments, the nanostructured film deposition takesplace in a chamber that is kept at a slight negative pressure relativeto ambient conditions, in order to inhibit or prevent nanoparticles fromentering the air in the surrounding room. This chamber can be purgedwith nitrogen gas during deposition to ensure laminar flow within thedeposition chamber.

One or more embodiments may employ one or more post-processingtechniques to improve conductivity, reduce roughness and pattern filmsto prepare them for use in devices. For example, as mentioned above,film roughness may damage organic materials such as those used in OLEDapplications. In one embodiment, a technique of spraying Ag nanowiresonto a thin (100-200 nm) film of PMMA (Poly(methyl methacrylate)) onglass and then pressing the mesh into the PMMA film is used to achievesurfaces that are smooth enough to use for OLEDs and solar cells.Heating (to 100-200° C.) is applied during this pressing step to improvewire/wire junctions. In one implementation, the pressing step is done at˜413 MPa with a stamp type press. For higher throughput, roll-to-rolltype production schemes, a roller-type press may be used.

In one or more embodiments, a laser annealing step may be employed tojoin Ag nanowire meshes, for example. This step rasters a defocused 30 WCO₂ laser over the mesh in order to sinter together wires at theircrossing points. In order to produce uniform annealing of the wire mesh,a cylindrical lens can be used so that the laser spot shape becomes aline instead of a circle. During annealing, a strong jet of N₂ impingeson the laser spot. In this embodiment, process parameters includingraster speed, raster spacing, laser power, and spot size can be set andcontrolled in accordance with the discussion herein. FIG. 2 shows such alaser annealing schematic, consistent with other embodiments of thepresent disclosure. The joining of the nanowires as points where thenanowires cross provides conductivity throughout the nanowire mesh.

In certain applications, it is valuable to define specific regions ofconductivity in the transparent film while leaving other regionsnon-conductive (e.g., in preparation for making a device on atransparent conductor). Presented herein are several different highresolution methods for patterning Ag nanowire meshes that removeconductivity from desired areas after nanowires have been joined atcrossing points.

In one implementation, a certain region of an Ag nanowire mesh isrendered non-conductive by overheating to break the connectivity of themesh. This causes the wires to aggregate into disconnected silverspheres. In this embodiment, a laser is used to heat the mesh in orderto gain very fine control of those areas that are overheated and thosethat are not. In certain cases, properly disconnecting mesh requiresraising the laser power per unit area per unit time to 2-3 times abovewhat is used in a laser annealing step. This can be done by increasinglaser output power, reducing spot size, slowing raster rate or somecombination thereof. Because this method can leave small silver spheresin the disconnected areas, making these films quite rough, this methodcan be readily implemented in applications in which low surfaceroughness may not be important (such as for capacitive touch screens).

Another embodiment is directed to a method for patterning an Ag nanowiremesh that leaves a clean substrate in some areas and a properlyconnected mesh in others. Here, the entire substrate is coated with a100-200 nm PMMA film. Spray deposition, annealing, and patterning areall done as described in the previous method, except that, instead ofsilver spheres, we get complete ablation in the patterned regions,leaving clean substrate exposed. This is a result of the laseroverheating the PMMA. The overheating effectively causes the wire meshon top of it to explode off the substrate surface and be carried away bythe N₂ gas flowing over the substrate during patterning.

FIGS. 3-13 illustrate example detailed/experimental-type embodimentsusing one or more of the various embodiments described above.

In connection with various embodiments, Ag and ZnO nanostructures werecombined to make hybrid electrodes, and exhibit surprising results suchas those relating to the combination of electrical conductivityfacilitated via the Ag nanowires structures and haze (scattering) viathe incorporation of ZnO nanoparticles. It has been discovered that,upon spraying these hybrid electrodes, in both the sequential sprayedimplementation (Ag then ZnO), or the simultaneous co-sprayed case,(Ag/ZnO mixture together), for the densities of particles used,sufficiently high haze factors were maintained while still maintaininglow sheet resistance throughout the film. This indicates that that theconductive properties were upheld despite addition of ZnO in a varietyof combination ratios with Ag.

The deposition and post-processing methods described above can be usedto yield flat, electrically connected and uniform Ag nanowire layers (inthe form of meshes) and ZnO nanoparticles. FIG. 3 shows a dense mesh ofAg nanowires as sprayed onto glass with no post-processing. Despite thishigh density, wire distribution is uniform and clumping and bundling ofwires is minimal. FIG. 4 shows sprayed ZnO nanoparticles. In thisembodiment, the nanoparticles have been engineered to facilitate (e.g.,maximize) visible light scattering and transmission.

FIG. 5 shows a fully processed spray-deposited Ag nanowire mesh embeddedinto a transparent polymer. This image highlights aspects of variousembodiments as achieved via post processing techniques described here.First, the wire-wire junctions are well connected. This high degree ofconnectivity reduces sheet resistance without impacting lighttransmission. Second, the wires and junctions are flat. This reducesshunting and allows for high performance OPV and OLED devices to bemade.

Various embodiments are directed to laser annealing, to facilitatecontrol over the amount of energy added to the mesh and produce superiorresults after annealing. Annealing times are measured in seconds ratherthan hours, allowing this process to be compatible with high throughputroll-to-roll production lines.

Table 1 (below) exemplifies laser annealing of a ZnO:Ag nanoparticlefilm and annealing of an Ag nanowire (AgNW) film annealed in an oven. Asindicated, there are varying effects of different annealing techniqueson the sheet resistances of nanostructured films.

TABLE 1 R_(SHEET) ANNEALING R_(SHEET) (post- SUBSTRATE METHOD (sprayed)annealed) 2:1 ZnO: Ag-1 mg/in² CO₂ Laser 855.08 23.15 AgNWs- 0.33 mg/in²Oven annealing 389.75 28.14 AgNWs- 0.66 mg/in² Oven annealing 22.22 9.69

Conductive AgNW meshes can be disconnected by overheating them using thesame laser annealing technique described above at higher laser powers.The increased laser power causes the wires to coalesce into spheres,leaving a non-conductive region. This high resolution process allows forselective patterning of 30 μm non-conductive regions.

FIG. 6 shows an Ag nanowire mesh on glass that has been transformed intodisconnected spheres of silver after application of a 30 W CO₂ laser.FIG. 7 shows laser ablation used with a flattened Ag nanowire meshembedded in a polymer. The left hand side of FIG. 7 shows clean glasssubstrate after PMMA and flattened Ag nanowires that have been laserablated. The right hand side shows a conductive Ag nanowire meshembedded in PMMA that is largely unaffected by the laser ablationpatterning technique.

In certain embodiments, it can be important to produce a thin film thathas a high conductivity while allowing desirable light transmission.Since many applications concern visible light, percent transmission isdefined here as total transmission weighted by the sun's AM1.5 spectrum.Transmission can be measured with an integrating sphere to capturephotons scattered by the film in addition to specular photons. Sheetresistance can be measured with a four point probe.

The DC to optical conductivity ratio is a single metric that combinesboth transmission and conductivity of a transparent film. Theconductivity ratio is given by the following equation:

$T = \left( {1 + {\left( \frac{188.5}{R_{s}} \right) \cdot \left( \frac{\sigma_{OP}}{\sigma_{D\; C}} \right)}} \right)^{- 2}$A higher DC to optical conductivity ratio is usually more desirable.

FIG. 8 and FIG. 9 demonstrate three generations of Ag nanowire meshespresented herein and other transparent conductor technologies (ITO,Graphene, and CNTs). First generation Ag nanowires (Gen1 AgNWs) resultsare from drop casted wire meshes. Second generation Ag nanowires (Gen2AgNWs) results show initial spray coater results with oven annealing.Third generation Ag nanowires (Gen3 AgNWs) results were achieved usingcontrol of spray deposition parameters and laser annealing postprocessing.

The scattering efficiency of films is measured using the haze factor.Thus:Haze(λ)=T _(diffuse)(λ)/T _(total)(λ),where T_(total)(λ) is the diffuse transmission at a given wavelength,and T_(dtotal)(λ) is the total transmission at a given wavelength. Thehaze factor can be interpreted as the fraction of transmitted light,which is scattered at a degree greater than 2.5 degrees from theincident light cone. For thin-film photovoltaic applications, wheremaximizing light absorption can be critical to improved deviceefficiencies, high haze factors can be employed in transparentelectrodes to increase the path length of sub-band gap photons inphotovoltaic device active layers.

FIG. 10 shows scattering that can be achieved by spraying increasingamounts of ZnO nanopyramids onto identical substrates with equaldensities of Ag nanowires (note that the haze from hybrid Ag:ZnO filmsare normalized by the haze of a pure Ag nanowire film sprayed at thesame conditions). With increasing amounts of ZnO, increases in the sheetresistances are observed but consistently remain below 100 Ω/sq.Similarly, FIG. 11 shows the haze from the same films as shown before,but instead normalized to the haze observed in CVD deposited ZnO filmsto compare the haze with a standard.

FIG. 11 shows haze improvement of hybrid films relative to low pressureCVD deposited ZnO. Haze improvement refers to the haze of a hybridnanostructured Ag/ZnO film normalized by the haze of a state-of-the-artvapor deposited ZnO transparent electrode. Here, the haze of the hybridfilm is normalized by the haze of a standard ZnO TCO film to illustratescattering achieved with a hybrid film in accordance with embodimentsherein.

Sheet resistances of the sprayed substrates from a particular run weremeasured at 10 different points per square inch of sprayed material,each of the sprayed substrates had an area of about 1 in². The datashown is from RUN21 in the runlog maintained for all spray depositionruns, where the material sprayed is 10.4 μm mean length and 50 nm meandiameter Ag nanowires.

Table 2 below shows large-area uniformity of spray deposition asconfirmed from sheet resistance measurements. Four-probe resistancemeasurements were performed 10 times on each square inch substrate (1-6)from a given run of spraying pure Ag nanowires with 10.4 μm mean length.

TABLE 2 Large area uniformity data Sub. R_(sheet) [Ω/sq] Sub. 1 Sub. 2Sub. 3 Sub. 4 Sub. 5 6 Measurement 1: 4.98 7.16 5.72 6.44 5.08 6.51Measurement 2: 5.21 6.36 5.71 7.81 5.20 6.22 Measurement 3: 5.72 6.525.18 8.90 5.66 7.34 Measurement 4: 5.94 6.96 6.43 5.74 5.48 6.63Measurement 5: 5.73 6.69 6.50 7.02 5.83 6.38 Measurement 6: 6.09 6.065.92 6.14 5.23 6.50 Measurement 7: 5.80 6.28 5.68 6.40 5.79 5.79Measurement 8: 5.62 6.74 5.20 7.80 6.02 5.84 Measurement 9: 6.41 6.395.49 6.95 5.57 6.89 Measurement 10: 5.58 6.34 5.28 6.25 4.95 4.40Average: 5.71 6.55 5.71 6.94 5.51 6.25 STD: 0.41 0.34 0.47 0.97 0.330.79

It is clear from the tables that for 6 in² of sprayed area, variationsin the sheet resistances are observed to vary no more than about 17%.This number is comparable to amorphous silicon solar cell manufacturerOerlikon's low pressure-CVD deposited ZnO transparent electrodes, whichexhibit sheet resistance variations of 15%. This illustrates thepotential compatibility of this technique as a large-scale depositionmechanism for nanostructured transparent electrodes.

FIG. 12 summarizes the results and shows the spray deposition runs. Thesummarized results are obtained from using hybrid nanostructured filmswith 10.4 μm mean length wires and zinc oxide nanopyramids. The range ofelectrical, optical, and scattering properties obtained exhibit theversatility of this nanostructured approach to achieve the desiredproperties for a particular transparent conducting application. Theillustration shows the spray deposition runs performed using 10.4 μm Agnanowires and ZnO nanopyramids 250 nm in height and width. Thetransmission at 600 nm is shown by the square markers, the haze at 600nm is shown by the circle markers, and the sheet resistance is shown bythe triangle markers. This figure illustrates the range of propertiesthat can be obtained with hybrid films and the ease to which theproperties can be tuned, depending on the desired transmission, haze,and sheet resistance. The trade-off between transmission and sheetresistance is small, and low sheet resistances are obtained fortransmissions (at 600 nm) greater than 80%.

For a particular Ag density, the transmission is observed to decreaseslightly with increasing ZnO density in the visible spectrum, but thehaze is observed to increase with the amount of zinc oxide. The sheetresistance, however, does not vary significantly with the amount of zincoxide in “layered” films, but does decrease with increasing densities ofAg nanowires resulting from the increased connectivity of the nanowiremat. Films are obtained with properties comparable with or better thanperformance benchmark transparent electrodes.

In accordance with various embodiments, a high degree of flexibility isachieved. Ag nanowire films on flexible 5 mil thick PET can berepeatedly bent to a 1.4 mm radius with no measurable increase in sheetresistance.

The present disclosure is beneficial in producing Organic Photovoltaic(OPV) cells, Organic Light Emitting Diodes (OLEDs), and Capacitive TouchScreens (using Ag nanowire meshes). For such devices, positive resultsfor device performance are shown from producing films with favorablesheet resistance, transmissivity and roughness.

In different aspects, the present disclosure involves a spray-depositionfabrication and post-processing techniques for nanostructured electrodesas may be implemented in a variety of applications. With pure silvernanowire meshes, sheet resistances well below 10 ohms/square and 90%transmission can be achieved. Further, hybrid Ag/ZnO nanostructuredfilms can be used as highly scattering transparent conducting electrodesfor use in thin film photovoltaics. Devices such as OLED and OPV onnanowire mesh transparent electrodes can be formed. Such spray-depositednanostructured transparent electrodes can be used in various capacitiesand are scalable for roll-to-roll electronics manufacturing.

Table 3 below is a summary of example process variables controlled usinga spray deposition process. Process variables and control ranges foreach of the parameters depicted therein can be altered to suitparticular types of nanostructured film deposition.

TABLE 3 Process Variable Range Nozzle Pressure 0-29 PSI Substrate Temp.22.5-150° C. Raster Velocity 0-300 mm/s Nozzle Height 0.5-20 cmSuspension Infusion Rate 1 μL/min-5 μL/min Step Size 1-100 mm SuspensionConcentration Manual: 0.1-10 mg/mL

Table 4 below lists particle densities for co-sprayed hybrid ZnO/Agfilms in different ratios, and the corresponding sheet resistances. Itis understood from this table that the sheet resistance correlatesdirectly to the density of silver nanowires on the substrate.

TABLE 4 ZnO Density Ag Density R_(sheet) Sample [partieles/cm⁻²][particles/cm⁻²] [Ω sq] 2:1 9.91e8 7.91e7 65.95 ZnO: Ag 1:1  6.631e89.22e7 23.15 ZnO: Ag 1:2 1.44e8  4.359e8 10.90 ZnO: Ag

The embodiments may be applicable to a variety of applications andstructures utilizing transparent and/or conductive films. Variousembodiments described above, may be implemented together and/or in othermanners. One or more of the items depicted in the present disclosure canalso be implemented in a more separated or integrated manner, or removedand/or rendered as inoperable in certain cases, as is useful inaccordance with particular applications. In view of the descriptionherein, those skilled in the art will recognize that many changes may bemade thereto without departing from the spirit and scope of theembodiments.

What is claimed is:
 1. A method, comprising: providing a first solutionhaving conductive nanowires suspended therein and a second solutionhaving nanostructures suspended therein; spraying the first and secondsolutions toward a substrate, and forming at least one mist therefrom,wherein the spraying is configured and arranged with droplets of themist being sized so that the droplets do not evaporate prior tocontacting the substrate; processing the at least one mist, while on thesubstrate, to provide a semitransparent conductive material in the formof a mesh having the conductive nanowires and nanoparticles, thenanoparticles configured and arranged to direct light passing andconnections between the nanowires configured and arranged to provide aconductivity characteristic throughout the material; and providing themesh as at least part of a film or layer, and wherein the mist formedfrom the solution includes droplets that upon reaching the substrate, donot coalesce on a surface of the substrate to form aggregations ofnanowires or nanoparticles that cause non-uniformities in the film orlayer.
 2. The method of claim 1, wherein the first and second solutionsare uniformly mixed together prior to contacting the substrate.
 3. Themethod of claim 1, wherein the first and second solutions are sprayedsequentially.
 4. The method of claim 1, wherein the conductive nanowiresare silver (Ag).
 5. The method of claim 1, wherein the nanoparticles arezinc oxide (ZnO).
 6. The method of claim 1, wherein the spraying isconducted in a deposition chamber that is purged with nitrogen gasduring deposition to ensure laminar flow within the deposition chamber.7. The method of claim 1, wherein the spraying is configured andarranged with droplets of the mist being sized so that neither nanowiresnor nanoparticles coalesce on the substrate, and the droplets do notevaporate prior to contacting the substrate.
 8. The method of claim 1,wherein the spraying is configured and arranged with droplets of themist being sized so that a majority of the droplets includes only one ofthe nanowires and nanoparticles.
 9. The method of claim 1, wherein thespraying is configured and arranged with droplets of the mist beingsized so that the droplets do not evaporate prior to contacting thesubstrate.
 10. A method, comprising: providing a solution havingconductive nanowires or nanoparticles suspended therein; spraying thesolution toward a substrate, and forming a mist therefrom with dropletsof the mist being sized so that a majority of the droplets includes onlyone of the nanowires and nanoparticles; processing the mist, as at leastsome of the nanowires or nanoparticles are being directed toward or onthe substrate, to provide a semitransparent conductive material in theform of a mesh of the nanowires; joining the nanowires or nanoparticlesof the mesh at points where the nanowires or nanoparticles cross ortouch to provide a conductivity characteristic throughout thesemitransparent conductive material; providing the mesh as at least partof a film or layer; and after the step of joining, applying laser lightin a portion of the mesh to break conductivity of nanowires ornanoparticles in the portion.
 11. The method of claim 10, wherein thejoining is performed using laser annealing to sinter nanowires atcrossing points.
 12. The method of claim 11, wherein a cylindrical lensis used to focus the laser into a line shape for the laser annealing.13. A method, comprising: providing a solution having conductivenanowires or nanoparticles suspended therein; spraying the solutiontoward a substrate, and forming a mist therefrom; processing the mist,while at least some of the nanowires or nanoparticles are being directedtoward and then on the substrate, to provide a semitransparentconductive material in the form of a mesh of the nanowires; joining thenanowires or nanoparticles of the mesh at points where the nanowires ornanoparticles cross or touch to provide a conductivity characteristicthroughout the semitransparent conductive material; and providing themesh as at least part of a film or layer, and after the step of joining,applying laser light in a portion of the mesh to break conductivity ofnanowires or nanoparticles in the portion, wherein the application oflaser light transforms the nanowires or nanoparticles in the portion ofthe mesh into spheres.
 14. The method of claim 10, wherein the mistincludes droplets and wherein the step of processing the mist includesprocessing said at least some of the nanowires or nanoparticles beforethey reach the substrate and after they are on the substrate, byregulating sizes of the droplets.
 15. The method of claim 10, whereinthe mist includes droplets and wherein the step of processing the mistincludes processing nanoparticles previously contained in the mist whilethe nanoparticles are on the substrate by regulating sizes of thedroplets, and wherein the method further includes using laser annealingto sinter nanowires at crossing points.
 16. The method of claim 10,wherein the step of providing the mesh includes a process that includesa laser ablation technique.
 17. The method of claim 16, wherein the stepof providing the mesh includes yielding a flat, electrically connectedand uniform layer, and wherein the substrate is a supporting structurecharacterized or composed of glass.
 18. The method of claim 10, whereinthe mist includes droplets that upon reaching the substrate, do notcoalesce on a surface of the substrate to form aggregations of nanowiresor nanoparticles.
 19. The method of claim 10, wherein the mist includesdroplets that are sufficiently large to reach the substrate beforeevaporating but not so large that they coalesce on a surface of thesubstrate and therefrom form aggregations of nanowires or nanoparticlesthat cause non-uniformities in the film or layer.
 20. The method ofclaim 10, wherein the mist includes droplets that are sufficiently largeto reach the substrate before evaporating but not so large that theycoalesce on a surface of the substrate and therefrom form aggregationsof nanowires or nanoparticles that cause non-uniformities in the film orlayer, and further including the steps of using a nozzle to spray themist and controlling the mist as a function of at least two of thefollowing parameters: nozzle pressure, infusion rate, and nozzle height.21. The method of claim 10, further including the steps of using anozzle to spray the mist and controlling the mist as a function of atleast two of the following parameters: nozzle pressure, infusion rate,and nozzle height.
 22. The method of claim 10, further including thesteps of using a nozzle to spray the mist and controlling the mist as afunction of at least two of the following parameters: nozzle pressurebeing less than 29 PSI, suspension infusion rate is less than 5 mL/min,and nozzle height within a range of 0.5-20 cm.
 23. The method of claim10, wherein the substrate is a structure arranged for supporting themesh, and further including providing the mesh on a synthesizedmaterial.
 24. The method of claim 1, wherein the mist formed from thesolution includes droplets that are sufficiently large to reach thesubstrate before evaporating but not so large that they coalesce on asurface of the substrate and therefrom form aggregations of nanowires ornanoparticles that cause non-uniformities in the film or layer.
 25. Amethod, comprising: providing a first solution having conductivenanowires suspended therein and a second solution having nanostructuressuspended therein; spraying the first and second solutions toward asubstrate, and forming at least one mist therefrom, wherein the sprayingis configured and arranged with droplets of the mist being sized so thatthe droplets do not evaporate prior to contacting the substrate;processing the at least one mist, while on the substrate, to provide asemitransparent conductive material in the form of a mesh having theconductive nanowires and nanoparticles, the nanoparticles configured andarranged to direct light passing and connections between the nanowiresconfigured and arranged to provide a conductivity characteristicthroughout the material; and using a nozzle to spray the mist andcontrolling the mist as a function of at least two of the followingparameters: nozzle pressure, infusion rate, and nozzle height.